Patent Assignment
Reel/Frame 050788/0315
Assignment of Assignor's Interest
Recorded: 2019-10-22
Pages: 7
Assignors
TERAMOTO, AKIHIRO
Executed: 2019-10-04
ENOKIDA, SUGURU
Executed: 2019-10-04
TSUCHIYAMA, MASASHI
Executed: 2019-10-10
SASAKI, KEISUKE
Executed: 2019-10-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method