Patent Assignment
Reel/Frame 050805/0350
Assignment of Assignor's Interest
Recorded: 2019-10-23
Pages: 6
Assignors
KIM, HYUNGJOON
Executed: 2019-09-09
KIM, MYOUNGWOON
Executed: 2019-08-29
JEONG, HEE JONG
Executed: 2019-08-29
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO,, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Radio Frequency (Rf) Power Monitoring Device and Plasma Enhanced (Pe) System Including the Same