Patent Assignment
Reel/Frame 050852/0047
Assignment of Assignor's Interest
Recorded: 2019-10-29
Pages: 4
Assignor
NAKASHIMA, TSUNENAGA
Executed: 2014-10-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus