Patent Assignment
Reel/Frame 050868/0217
Assignment of Assignor's Interest
Recorded: 2019-10-30
Pages: 5
Assignors
SUN, XINGHUA
Executed: 2019-10-17
LU, YEN-TIEN
Executed: 2019-10-17
RALEY, ANGELIQUE
Executed: 2019-10-30
O'MEARA, DAVID
Executed: 2019-10-17
SMITH, JEFFREY
Executed: 2019-10-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Ald (Atomic Layer Deposition) Liner for via Profile Control and Related Applications