Patent Assignment
Reel/Frame 050891/0509
Assignment of Assignor's Interest
Recorded: 2019-11-01
Pages: 10
Assignors
HAGIHARA, JUNICHI
Executed: 2019-10-24
KOMATSU, SHIGEKAZU
Executed: 2019-10-25
FURUYA, KUNIHIRO
Executed: 2019-10-25
HOSAKA, TADAYOSHI
Executed: 2019-10-24
MURAMATSU, NAOKI
Executed: 2019-10-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Wafer Inspection System, Wafer Inspection Apparatus and Prober
Application:
16/671,410 →
Publication:
US 2020/0064400