Patent Assignment
Reel/Frame 050906/0359
Assignment of Assignor's Interest
Recorded: 2019-11-04
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Cleaning Method, Semiconductor Manufacturing Method and a System Thereof