Patent Assignment
Reel/Frame 050911/0926
Assignment of Assignor's Interest
Recorded: 2019-11-05
Pages: 4
Assignors
SASAKI, YUTA
Executed: 2019-10-03
TAKAHASHI, HIROAKI
Executed: 2019-10-03
OTSUJI, MASAYUKI
Executed: 2019-10-03
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Drying Method and Substrate Processing Apparatus