Patent Assignment
Reel/Frame 050930/0511
Assignment of Assignor's Interest
Recorded: 2019-11-06
Pages: 4
Assignors
SHI, XIAOBO
Executed: 2019-10-29
ZHOU, HONGJUN
Executed: 2019-11-04
SCHLUETER, JAMES ALLEN
Executed: 2019-11-06
SCHWARTZ, JO-ANN T.
Executed: 2019-10-21
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., TEMPE, ARIZONA, 85284
Covered Property
(1)
Chemical Mechanical Planarization For Tungsten-Containing Substrates