Patent Assignment
Reel/Frame 050931/0075
Assignment of Assignor's Interest
Recorded: 2019-11-06
Pages: 3
Assignors
INADA, TAKAO
Executed: 2019-11-05
HYAKUTAKE, HIRONOBU
Executed: 2019-11-05
KAWANO, HISASHI
Executed: 2019-11-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus