Patent Assignment
Reel/Frame 050981/0101
Assignment of Assignor's Interest
Recorded: 2019-11-12
Pages: 5
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Vacuum Ultraviolet Lamp Assisted Ignition of Oxygen-Containing Laser Sustained Plasma Sources