Patent Assignment
Reel/Frame 051038/0858
Assignment of Assignor's Interest
Recorded: 2019-11-18
Pages: 4
Assignee
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
291 DAEHAK-RO, YUSEONG-GU, DAEJEON, 34141, KOREA, REPUBLIC OF
Covered Property
(1)
Mems Membrane Structure and Method of Fabricating Same