Patent Assignment
Reel/Frame 051051/0180
Assignment of Assignor's Interest
Recorded: 2019-11-19
Pages: 3
Assignor
GRUNER, TORALF
Executed: 2019-11-18
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure Method and Projection Lens with Setting of the Pupil Transmission