Patent Assignment
Reel/Frame 051056/0992
Assignment of Assignor's Interest
Recorded: 2019-11-19
Pages: 6
Assignors
TANG, FENG
Executed: 2019-10-17
PENG, CHANGZHE
Executed: 2019-10-17
WANG, XIANGZHAO
Executed: 2019-10-17
LU, YUNJUN
Executed: 2019-10-17
LI, PENG
Executed: 2019-10-17
Assignee
SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS, CHINESE ACADEMY OF SCIENCES
NO. 390, QINGHE ROAD, JIADING, SHANGHAI, 201800, CHINA
Covered Property
(1)
Device and Method for Detecting Projection Objective Wave-Front Aberration