Patent Assignment
Reel/Frame 051078/0868
Assignment of Assignor's Interest
Recorded: 2019-11-21
Pages: 3
Assignor
KOOIMAN, MARLEEN
Executed: 2018-12-19
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Sem Fov Fingerprint in Stochastic Epe and Placement Measurements in Large Fov Sem Devices