Patent Assignment
Reel/Frame 051138/0054
Assignment of Assignor's Interest
Recorded: 2019-11-29
Pages: 2
Assignor
KOSHIMIZU, CHISHIO
Executed: 2019-11-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Etching Method