Patent Assignment
Reel/Frame 051165/0940
Assignment of Assignor's Interest
Recorded: 2019-12-03
Pages: 3
Assignors
CHUANG, HARRY-HAK-LAY
Executed: 2019-10-25
CHEN, JUN-YAO
Executed: 2019-10-25
WANG, HUNG CHO
Executed: 2019-10-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Embedded Mram Fabrication Process for Ion Beam Etching with Protection by Top Electrode Spacer