Patent Assignment
Reel/Frame 051180/0415
Assignment of Assignor's Interest
Recorded: 2019-12-04
Pages: 3
Assignors
FUJIHARA, JUN
Executed: 2019-11-15
UEDA, MASANORI
Executed: 2019-11-15
KONISHI, KENTARO
Executed: 2019-11-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Inspection Apparatus, Inspection System, and Aligning Method