Patent Assignment
Reel/Frame 051250/0057
Assignment of Assignor's Interest
Recorded: 2019-12-11
Pages: 7
Assignors
OBWEGER, RAINER
Executed: 2014-10-06
GLEISSNER, ANDREAS
Executed: 2014-10-08
WIRNSBERGER, THOMAS
Executed: 2014-10-06
KUMNIG, FRANZ
Executed: 2014-10-06
BALDARO, ALESSANDRO
Executed: 2014-10-08
FISCHER, CHRISTIAN THOMAS
Executed: 2014-10-06
CHOU, MU HUNG
Executed: 2014-10-06
DYLEWICZ, RAFAL RYSZARD
Executed: 2014-10-06
LAVDOVSKY, NATHAN
Executed: 2014-10-06
BERRY, IVAN L., III
Executed: 2014-10-01
Assignee
LAM RESEARCH AG
SEZ STRASSE 1, VILLACH, A-9500, AUSTRIA
Covered Property
(1)
Method and Apparatus for Processing Wafer-Shaped Articles