Patent Assignment
Reel/Frame 051257/0952
Assignment of Assignor's Interest
Recorded: 2019-12-12
Pages: 4
Assignors
HIGASHIJIMA, JIRO
Executed: 2017-09-04
OGATA, NOBUHIRO
Executed: 2017-09-04
HASHIMOTO, YUSUKE
Executed: 2017-09-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus