Patent Assignment
Reel/Frame 051262/0535
Assignment of Assignor's Interest
Recorded: 2019-12-12
Pages: 3
Assignors
NUMAKURA, MASAHIRO
Executed: 2019-12-10
TOYOMAKI, TOSHIAKI
Executed: 2019-12-10
KAISE, SEIICHI
Executed: 2019-12-10
TAKEYAMA, YUKI
Executed: 2019-12-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System of Processing Substrate, Transfer Method, Transfer Program, and Holder