Patent Assignment
Reel/Frame 051277/0754
Assignment of Assignor's Interest
Recorded: 2019-12-13
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538-6470
Covered Property
(1)
Substrate Pedestal Module Including Backside Gas Delivery Tube and Method of Making