Patent Assignment
Reel/Frame 051279/0180
Assignment of Assignor's Interest
Recorded: 2019-12-13
Pages: 3
Assignor
WILTSE, JOHN
Executed: 2015-12-31
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Actuator to Adjust Dynamically Showerhead Tilt in a Semiconductor- Processing Apparatus