Patent Assignment
Reel/Frame 051290/0939
Assignment of Assignor's Interest
Recorded: 2019-12-16
Pages: 6
Assignors
HAN, ILYOUNG
Executed: 2019-12-05
PARK, HUNYONG
Executed: 2019-12-05
HAN, SOHEE
Executed: 2019-12-05
KWAK, NOHSUNG
Executed: 2019-12-05
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus and Driving Method Thereof