Patent Assignment
Reel/Frame 051306/0374
Assignment of Assignor's Interest
Recorded: 2019-12-17
Pages: 4
Assignors
KUNO, TATSUYA
Executed: 2019-06-07
MORIOKA, IKUHISA
Executed: 2019-06-07
KATAIGI, TAKASHI
Executed: 2019-06-07
AIKAWA, KENICHIRO
Executed: 2019-06-07
Assignee
NGK INSULATORS, LTD.
2-56, SUDA-CHO, MIZUHO-KU, NAGOYA-CITY, AICHI-PREFECTURE, 467-8530, JAPAN
Covered Property
(1)
Electrostatic Chuck and Method for Manufacturing the Same