Patent Assignment
Reel/Frame 051325/0992
Assignment of Assignor's Interest
Recorded: 2019-12-18
Pages: 2
Assignors
WU, MING-FA
Executed: 2019-09-17
HO, WEN-LUNG
Executed: 2019-09-17
YANG, HUAI-TEI
Executed: 2019-09-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Vacuum Systems in Semiconductor Fabrication Facilities