Patent Assignment
Reel/Frame 051330/0535
Assignment of Assignor's Interest
Recorded: 2019-12-19
Pages: 4
Assignors
CHEN, TUNG-KAI
Executed: 2019-09-20
WANG, SHANG-YU
Executed: 2019-09-20
PAN, WAN-CHUN
Executed: 2019-09-20
WEI, ZINK
Executed: 2019-09-20
HUANG, HUI-CHI
Executed: 2019-09-20
CHEN, KEI-WEI
Executed: 2019-09-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6 HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Chemical Mechanical Planarization Tool