Patent Assignment
Reel/Frame 051331/0415
Assignment of Assignor's Interest
Recorded: 2019-12-19
Pages: 7
Assignors
VAN LEEST, ADRIAAN JOHAN
Executed: 2017-03-28
MC NAMARA, ELLIOTT GERARD
Executed: 2017-04-14
TSIATMAS, ANAGNOSTIS
Executed: 2017-03-23
HINNEN, PAUL CHRISTIAAN
Executed: 2017-03-23
VERMA, ALOK
Executed: 2017-03-23
THEEUWES, THOMAS
Executed: 2017-03-23
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2017-03-23
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus to Determine a Patterning Process Parameter