Patent Assignment
Reel/Frame 051346/0088
Assignment of Assignor's Interest
Recorded: 2019-12-20
Pages: 3
Assignor
PORE, VILJAMI
Executed: 2015-02-23
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Properties
(4)
Atomic Layer Deposition of Silicon Carbon Nitride Based Materials
Atomic Layer Deposition of Silicon Carbon Nitride Based Materials
Atomic Layer Deposition of Silicon Carbon Nitride Based Materials
Atomic Layer Deposition of Silicon Carbon Nitride Based Material