Patent Assignment
Reel/Frame 051355/0198
Assignment of Assignor's Interest
Recorded: 2019-12-23
Pages: 4
Assignors
FUJII, TORU
Executed: 2019-12-20
KONTA, YOSHITOMO
Executed: 2019-12-20
OTSUKI, KOHEI
Executed: 2019-12-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method