Patent Assignment
Reel/Frame 051364/0791
Assignment of Assignor's Interest
Recorded: 2019-12-25
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Overlay Metrology Tool and Methods of Performing Overlay Measurements