Patent Assignment
Reel/Frame 051365/0811
Assignment of Assignor's Interest
Recorded: 2019-12-26
Pages: 3
Assignors
OTSU, TAKAHIKO
Executed: 2019-12-23
KOYAMA, KAZUYA
Executed: 2019-12-09
INADA, TAKAO
Executed: 2019-12-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus