Patent Assignment
Reel/Frame 051374/0192
Assignment of Assignor's Interest
Recorded: 2019-12-27
Pages: 4
Assignors
OKUTANI, MANABU
Executed: 2019-12-09
OSUKA, TSUTOMU
Executed: 2019-12-17
HIGASHI, KATSUEI
Executed: 2019-12-09
ABE, HIROSHI
Executed: 2019-12-09
YOSHIHARA, NAOHIKO
Executed: 2019-12-10
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus