Patent Assignment
Reel/Frame 051379/0693
Assignment of Assignor's Interest
Recorded: 2019-12-27
Pages: 4
Assignor
IWAMOTO, TADAMASA
Executed: 2019-11-14
Assignee
TDK CORPORATION
2-5-1, NIHONBASHI, CHUO-KU, TOKYO, 103-6128, JAPAN
Covered Property
(1)
Bottom Gas Purge Unit, Load Port Apparatus, and Bottom Gas Purge Method