Patent Assignment
Reel/Frame 051382/0332
Assignment of Assignor's Interest
Recorded: 2019-12-28
Pages: 4
Assignor
FENG, YAOBIN
Executed: 2019-10-24
Assignee
YANGTZE MEMORY TECHNOLOGIES CO., LTD.
18 GAOXIN 4TH ROAD, EAST LAKE HIGH-TECH DEVELOPMENT ZONE, WUHAN, HUBEI, CHINA
Covered Property
(1)
Systems and Methods for Evaluating Critical Dimensions Based on Diffraction-Based Overlay Metrology