Patent Assignment
Reel/Frame 051389/0683
Assignment of Assignor's Interest
Recorded: 2019-12-30
Pages: 5
Assignors
SASAMI, TAKESHI
Executed: 2019-11-11
YAMADA, KENJI
Executed: 2019-11-11
HATAKEYAMA, JUN
Executed: 2019-11-11
WATANABE, SATOSHI
Executed: 2019-11-11
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process