Patent Assignment
Reel/Frame 051392/0078
Assignment of Assignor's Interest
Recorded: 2019-12-31
Pages: 5
Assignors
HUANG, YAHUI
Executed: 2019-11-12
WEI, GANG
Executed: 2019-11-12
LI, YICHENG
Executed: 2019-11-12
MAO, XINGFEI
Executed: 2019-11-12
Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
NO.8 WENCHANG AVENUE, BEIJING ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA, BEIJING, 100176, CHINA
Covered Property
(1)
Lower Electrode Mechanism and Reaction Chamber