Patent Assignment
Reel/Frame 051452/0488
Assignment of Assignor's Interest
Recorded: 2020-01-08
Pages: 3
Assignor
KOSHIMIZU, CHISHIO
Executed: 2019-12-25
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus