Patent Assignment
Reel/Frame 051467/0636
Assignment of Assignor's Interest
Recorded: 2020-01-09
Pages: 2
Assignors
TAMAMUSHI, GEN
Executed: 2020-01-07
NAGASEKI, KAZUYA
Executed: 2020-01-06
KOSHIMIZU, CHISHIO
Executed: 2020-01-07
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Upper Electrode and Plasma Processing Apparatus