Patent Assignment
Reel/Frame 051475/0479
Assignment of Assignor's Interest
Recorded: 2020-01-10
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN 6 ROAD, HSINCHU SCIENCE PARK, HSINCHU, ROC 30077, TAIWAN
Covered Property
(1)
Methods for Patterning a Silicon Oxide-Silicon Nitride-Silicon Oxide Stack and Structures Formed by the Same