Patent Assignment
Reel/Frame 051484/0149
Assignment of Assignor's Interest
Recorded: 2020-01-03
Pages: 5
Assignors
OGIHARA, TSUTOMU
Executed: 2019-11-26
BIYAJIMA, YUSUKE
Executed: 2019-11-26
KANAYAMA, MASAHIRO
Executed: 2019-11-26
WATANABE, TSUKASA
Executed: 2019-11-26
OHASHI, MASAKI
Executed: 2019-11-26
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Composition for Forming Silicon-Containing Resist Underlayer Film and Patterning Process