Patent Assignment
Reel/Frame 051484/0973
Assignment of Assignor's Interest
Recorded: 2020-01-06
Pages: 6
Assignors
BAUER, MARKUS
Executed: 2017-08-14
BINGEL, ULRICH
Executed: 2017-10-24
ANDERL, WILLI
Executed: 2017-07-24
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Producing a Reflective Optical Element, Reflective Optical Element, and Use of a Reflective Optical Element