Patent Assignment
Reel/Frame 051496/0326
Assignment of Assignor's Interest
Recorded: 2020-01-13
Pages: 6
Assignors
KOSUGI, HITOSHI
Executed: 2019-12-23
UMEZAKI, SHOTA
Executed: 2019-12-27
TACHIBANA, KOUZOU
Executed: 2019-12-24
YAMAMOTO, RYO
Executed: 2019-12-23
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus