Patent Assignment
Reel/Frame 051499/0535
Assignment of Assignor's Interest
Recorded: 2020-01-13
Pages: 5
Assignors
CHEN, AMO
Executed: 2015-12-07
LIN, YUN-YUE
Executed: 2015-12-07
LIEN, TA-CHENG
Executed: 2015-12-07
LEE, HSIN-CHANG
Executed: 2015-12-07
LIN, CHIH-CHENG
Executed: 2015-12-07
CHEN, JENG-HORNG
Executed: 2015-12-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Pellicle Assembly and Method for Advanced Lithography