Patent Assignment
Reel/Frame 051504/0343
Assignment of Assignor's Interest
Recorded: 2020-01-14
Pages: 4
Assignors
LIU, CHUN-TING
Executed: 2020-01-07
CHANG, HAN-YU
Executed: 2020-01-06
HE, BO-CHING
Executed: 2020-01-07
CHEN, GUO-DUNG
Executed: 2020-01-07
WU, WEN-LI
Executed: 2020-01-04
FU, WEI-EN
Executed: 2020-01-08
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
NO. 195, SEC. 4, CHUNG HSING RD., CHUTUNG, HSINCHU, 31057, TAIWAN
Covered Property
(1)
Device and Method Applicable for Measuring Ultrathin Thickness of Film on Substrate