Patent Assignment
Reel/Frame 051528/0113
Assignment of Assignor's Interest
Recorded: 2020-01-15
Pages: 11
Assignors
SHANKAR, NAGRAJ
Executed: 2018-04-26
REDDY, KAPU SIRISH
Executed: 2018-05-07
HENRI, JON
Executed: 2018-04-26
ZHANG, PENGYI
Executed: 2018-04-26
MOHIMI, ELHAM
Executed: 2018-04-27
JARIWALA, BHAVIN
Executed: 2018-04-27
MAHOROWALA, ARPAN PRAVIN
Executed: 2018-04-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Selective Deposition of Etch-Stop Layer for Enhanced Patterning