Patent Assignment
Reel/Frame 051536/0506
Assignment of Assignor's Interest
Recorded: 2020-01-16
Pages: 7
Assignors
CHO, BYUNGKWON
Executed: 2019-12-20
PARK, SANGJINE
Executed: 2019-12-20
KO, YONGSUN
Executed: 2019-12-20
JEON, SEULGEE
Executed: 2019-12-10
JEONG, JIHOON
Executed: 2019-12-20
HONG, SEONGSIK
Executed: 2019-12-20
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Wafer Cleaning Apparatus Based on Light Irradiation and Wafer Cleaning System Including the Same