Patent Assignment
Reel/Frame 051543/0893
Assignment of Assignor's Interest
Recorded: 2020-01-17
Pages: 4
Assignors
SCHMITT-WEAVER, EMIL PETER
Executed: 2015-06-23
STÄCKER, JENS
Executed: 2015-06-25
SCHREEL, KOENRAAD REMI ANDRÉ MARIA
Executed: 2015-06-23
WERKMAN, ROY
Executed: 2015-06-23
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Calibration Method for a Lithographic Apparatus