Patent Assignment
Reel/Frame 051548/0051
Assignment of Assignor's Interest
Recorded: 2020-01-17
Pages: 4
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Control Apparatus and Method for Controlling a Manipulator in Respect of a Microlithographic Projection Exposure Apparatus