Patent Assignment
Reel/Frame 051554/0330
Assignment of Assignor's Interest
Recorded: 2020-01-20
Pages: 3
Assignors
LEE, HAKJOO
Executed: 2019-10-17
LEE, HAKJOON
Executed: 2019-10-18
KIM, YOUNGSIM
Executed: 2019-10-18
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method of Cleaning Substrate Processing Apparatus