Patent Assignment
Reel/Frame 051558/0367
Assignment of Assignor's Interest
Recorded: 2020-01-20
Pages: 10
Assignors
VENTZEK, PETER
Executed: 2019-08-01
RANJAN, ALOK
Executed: 2020-01-16
OHATA, MITSUNORI
Executed: 2019-08-13
HUMMEL, MICHAEL
Executed: 2019-07-23
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mode-Switching Plasma Systems and Methods of Operating Thereof